Quality control in microelectronics using scanning probe microscopy

Kudělka, Josef; Martínek, Tomáš; Navrátil, Milan; Křesálek, Vojtěch

Title:	Quality control in microelectronics using scanning probe microscopy
Author:	Kudělka, Josef; Martínek, Tomáš; Navrátil, Milan; Křesálek, Vojtěch
Document type:	Peer-reviewed article (English)
Source document:	2016 21st International Conference on Microwave, Radar and Wireless Communications, MIKON 2016. 2016
ISBN:	978-150902214-4
DOI:	https://doi.org/10.1109/MIKON.2016.7492107
Abstract:	In this paper, atomic force microscopy and its variation scanning microwave microscopy were used for the characterization of microelectronics (PNP bipolar transistors on a chip and epitaxial layers with different properties on a silicon substrate). The capabilities of these methods in the quality control process are presented. © 2016 IEEE.
Full text:	http://ieeexplore.ieee.org/document/7492107/?arnumber=7492107
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Citace článku v časopise:
KUDĚLKA, Josef, Tomáš MARTÍNEK, Milan NAVRÁTIL a Vojtěch KŘESÁLEK. Quality control in microelectronics using scanning probe microscopy. 2016 21st International Conference on Microwave, Radar and Wireless Communications, MIKON 2016 [online]. 2016 [cit. 2024-07-27]. Dostupné z: http://ieeexplore.ieee.org/document/7492107/?arnumber=7492107.

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