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Quality control in microelectronics using scanning probe microscopy

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dc.title Quality control in microelectronics using scanning probe microscopy en
dc.contributor.author Kudělka, Josef
dc.contributor.author Martínek, Tomáš
dc.contributor.author Navrátil, Milan
dc.contributor.author Křesálek, Vojtěch
dc.relation.ispartof 2016 21st International Conference on Microwave, Radar and Wireless Communications, MIKON 2016
dc.identifier.isbn 978-150902214-4
dc.date.issued 2016
dc.event.title 21st International Conference on Microwave, Radar and Wireless Communications, MIKON 2016
dc.event.location Krakow
utb.event.state-en Poland
utb.event.state-cs Polsko
dc.event.sdate 2016-05-09
dc.event.edate 2016-05-11
dc.type article
dc.language.iso en
dc.publisher Institute of Electrical and Electronics Engineers (IEEE)
dc.identifier.doi 10.1109/MIKON.2016.7492107
dc.relation.uri http://ieeexplore.ieee.org/document/7492107/?arnumber=7492107
dc.subject Atomic force microscopy en
dc.subject Quality control en
dc.subject Scanning microwave microscopy en
dc.subject Scanning probe microscopy en
dc.description.abstract In this paper, atomic force microscopy and its variation scanning microwave microscopy were used for the characterization of microelectronics (PNP bipolar transistors on a chip and epitaxial layers with different properties on a silicon substrate). The capabilities of these methods in the quality control process are presented. © 2016 IEEE. en
utb.faculty Faculty of Applied Informatics
dc.identifier.uri http://hdl.handle.net/10563/1006592
utb.identifier.obdid 43875780
utb.identifier.scopus 2-s2.0-84979281164
utb.identifier.wok 000390422000161
utb.source d-scopus
dc.date.accessioned 2016-09-21T13:12:22Z
dc.date.available 2016-09-21T13:12:22Z
utb.contributor.internalauthor Kudělka, Josef
utb.contributor.internalauthor Martínek, Tomáš
utb.contributor.internalauthor Navrátil, Milan
utb.contributor.internalauthor Křesálek, Vojtěch
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