TBU Publications
Repository of TBU Publications

Nanoscale characterization of ultra-thin tungsten films deposited by radio-frequency magnetron sputtering

DSpace Repository

Show simple item record


dc.title Nanoscale characterization of ultra-thin tungsten films deposited by radio-frequency magnetron sputtering en
dc.contributor.author Martínek, Tomáš
dc.contributor.author Kudělka, Josef
dc.contributor.author Navrátil, Milan
dc.contributor.author Křesálek, Vojtěch
dc.contributor.author Fejfar, Antonín
dc.contributor.author Hývl, Matěj
dc.contributor.author Sobota, Jaroslav
dc.relation.ispartof IEEE-NANO 2015 - 15th International Conference on Nanotechnology
dc.identifier.isbn 978-1-4673-8156-7
dc.date.issued 2015
dc.citation.spage 510
dc.citation.epage 513
dc.event.title 15th IEEE International Conference on Nanotechnology, IEEE-NANO 2015
dc.event.location Rome
utb.event.state-en Italy
utb.event.state-cs Itálie
dc.event.sdate 2015-07-27
dc.event.edate 2015-07-30
dc.type conferenceObject
dc.language.iso en
dc.publisher Institute of Electrical and Electronics Engineers (IEEE)
dc.identifier.doi 10.1109/NANO.2015.7388651
dc.relation.uri http://ieeexplore.ieee.org/document/7388651/
dc.subject atomic force microscopy en
dc.subject nanocharacterization en
dc.subject nanometrology en
dc.subject tungsten en
dc.subject ultra-thin film en
dc.description.abstract In this article, atomic force microscopy was used for nanoscale characterization of ultra-thin tungsten films which were deposited on silicon substrate. Radio-frequency magnetron sputtering was used for tungsten deposition on the surface. © 2015 IEEE. en
utb.faculty Faculty of Applied Informatics
dc.identifier.uri http://hdl.handle.net/10563/1006415
utb.identifier.obdid 43873851
utb.identifier.scopus 2-s2.0-84964329824
utb.identifier.wok 000380515200031
utb.source d-scopus
dc.date.accessioned 2016-07-26T14:58:28Z
dc.date.available 2016-07-26T14:58:28Z
utb.contributor.internalauthor Martínek, Tomáš
utb.contributor.internalauthor Kudělka, Josef
utb.contributor.internalauthor Navrátil, Milan
utb.contributor.internalauthor Křesálek, Vojtěch
utb.fulltext.affiliation Tomáš Martínek, Josef Kudělka, Milan Navrátil, Vojtěch Křesálek, Antonín Fejfar, Matěj Hývl, Jaroslav Sobota Tomas Bata University in Zlín Faculty of Applied Informatics Czech Republic Institute of Physics ASCR Czech Republic Institute of Scientific Instruments ASCR Czech Republic
utb.fulltext.dates -
utb.fulltext.faculty Faculty of Applied Informatics
utb.fulltext.faculty Faculty of Applied Informatics
utb.fulltext.faculty Faculty of Applied Informatics
utb.fulltext.faculty Faculty of Applied Informatics
Find Full text

Files in this item

Show simple item record