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Nanoscale characterization of ultra-thin tungsten films deposited by radio-frequency magnetron sputtering

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Citace článku v konferenčním sborníku:
MARTÍNEK, Tomáš, Josef KUDĚLKA, Milan NAVRÁTIL, Vojtěch KŘESÁLEK, Antonín FEJFAR, Matěj HÝVL a Jaroslav SOBOTA. Nanoscale characterization of ultra-thin tungsten films deposited by radio-frequency magnetron sputtering. In: IEEE-NANO 2015 - 15th International Conference on Nanotechnology [online]. Rome: Institute of Electrical and Electronics Engineers (IEEE), 2015, s. 510-513. [cit. 2020-12-03]. Dostupné z: http://ieeexplore.ieee.org/document/7388651/.

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