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The effect of scratching direction in AFM nanolithography
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| dc.title | The effect of scratching direction in AFM nanolithography | en |
| dc.contributor.author | Kudělka, Josef | |
| dc.contributor.author | Martínek, Tomáš | |
| dc.contributor.author | Navrátil, Milan | |
| dc.contributor.author | Křesálek, Vojtěch | |
| dc.relation.ispartof | 7th International Conference on Information Science and Technology, ICIST 2017 - Proceedings | |
| dc.identifier.issn | 2164-4357 Scopus Sources, Sherpa/RoMEO, JCR | |
| dc.identifier.isbn | 978-1-5090-5401-5 | |
| dc.date.issued | 2017 | |
| dc.citation.spage | 331 | |
| dc.citation.epage | 334 | |
| dc.event.title | 7th International Conference on Information Science and Technology, ICIST 2017 | |
| dc.event.location | Da Nang | |
| utb.event.state-en | Vietnam | |
| utb.event.state-cs | Vietnam | |
| dc.event.sdate | 2017-04-16 | |
| dc.event.edate | 2017-04-19 | |
| dc.type | conferenceObject | |
| dc.language.iso | en | |
| dc.publisher | Institute of Electrical and Electronics Engineers (IEEE) | |
| dc.identifier.doi | 10.1109/ICIST.2017.7926779 | |
| dc.relation.uri | http://ieeexplore.ieee.org/abstract/document/7926779/ | |
| dc.subject | scractching direction | en |
| dc.subject | AFM scratching | en |
| dc.subject | scanning probe lithography | en |
| dc.subject | nanofrabication | en |
| dc.subject | atomic force microscopy | en |
| dc.subject | polycarbonate | en |
| dc.description.abstract | In this paper, we investigated the effect of scratching direction in AFM scratching. The understanding of this effect is one of the key factors in the patterning process. In our experiment, several testing grooves were engraved in all four basic directions (forward, backward, right and left) on polycarbonate substrate using Si probe. Both the fabrication and subsequent characterization were performed using the identical atomic force microscope. Our results were compared to previous reports. It was found that scratching in the backward direction is the most suitable for the common usage. © 2017 IEEE. | en |
| utb.faculty | Faculty of Applied Informatics | |
| dc.identifier.uri | http://hdl.handle.net/10563/1007447 | |
| utb.identifier.obdid | 43877484 | |
| utb.identifier.scopus | 2-s2.0-85020233639 | |
| utb.identifier.wok | 000403402600054 | |
| utb.source | d-scopus | |
| dc.date.accessioned | 2017-09-08T12:14:56Z | |
| dc.date.available | 2017-09-08T12:14:56Z | |
| dc.description.sponsorship | Ministry of Education, Youth and Sports of the Czech Republic within the National Sustainability Programme [LO1303 (NISMT-7771/2014)] | |
| utb.contributor.internalauthor | Kudělka, Josef | |
| utb.contributor.internalauthor | Martínek, Tomáš | |
| utb.contributor.internalauthor | Navrátil, Milan | |
| utb.contributor.internalauthor | Křesálek, Vojtěch | |
| utb.scopus.affiliation | Department of Electronics and Measurement, Faculty of Applied Informatics, Tomas Bata University in Zlin, Zlin, Czech Republic |
