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Quality control in microelectronics using scanning probe microscopy
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| dc.title | Quality control in microelectronics using scanning probe microscopy | en |
| dc.contributor.author | Kudělka, Josef | |
| dc.contributor.author | Martínek, Tomáš | |
| dc.contributor.author | Navrátil, Milan | |
| dc.contributor.author | Křesálek, Vojtěch | |
| dc.relation.ispartof | 2016 21st International Conference on Microwave, Radar and Wireless Communications, MIKON 2016 | |
| dc.identifier.isbn | 978-150902214-4 | |
| dc.date.issued | 2016 | |
| dc.event.title | 21st International Conference on Microwave, Radar and Wireless Communications, MIKON 2016 | |
| dc.event.location | Krakow | |
| utb.event.state-en | Poland | |
| utb.event.state-cs | Polsko | |
| dc.event.sdate | 2016-05-09 | |
| dc.event.edate | 2016-05-11 | |
| dc.type | article | |
| dc.language.iso | en | |
| dc.publisher | Institute of Electrical and Electronics Engineers (IEEE) | |
| dc.identifier.doi | 10.1109/MIKON.2016.7492107 | |
| dc.relation.uri | http://ieeexplore.ieee.org/document/7492107/?arnumber=7492107 | |
| dc.subject | Atomic force microscopy | en |
| dc.subject | Quality control | en |
| dc.subject | Scanning microwave microscopy | en |
| dc.subject | Scanning probe microscopy | en |
| dc.description.abstract | In this paper, atomic force microscopy and its variation scanning microwave microscopy were used for the characterization of microelectronics (PNP bipolar transistors on a chip and epitaxial layers with different properties on a silicon substrate). The capabilities of these methods in the quality control process are presented. © 2016 IEEE. | en |
| utb.faculty | Faculty of Applied Informatics | |
| dc.identifier.uri | http://hdl.handle.net/10563/1006592 | |
| utb.identifier.obdid | 43875780 | |
| utb.identifier.scopus | 2-s2.0-84979281164 | |
| utb.identifier.wok | 000390422000161 | |
| utb.source | d-scopus | |
| dc.date.accessioned | 2016-09-21T13:12:22Z | |
| dc.date.available | 2016-09-21T13:12:22Z | |
| utb.contributor.internalauthor | Kudělka, Josef | |
| utb.contributor.internalauthor | Martínek, Tomáš | |
| utb.contributor.internalauthor | Navrátil, Milan | |
| utb.contributor.internalauthor | Křesálek, Vojtěch | |
| utb.fulltext.affiliation | Josef Kudelka, Tomas Martinek, Milan Navratil, Vojtech Kresalek Department of Electronics and Measurement Faculty of Applied Informatics, Tomas Bata University in Zlín Zlín, Czech Republic | |
| utb.fulltext.dates | - | |
| utb.fulltext.faculty | Faculty of Applied Informatics | |
| utb.fulltext.faculty | Faculty of Applied Informatics | |
| utb.fulltext.faculty | Faculty of Applied Informatics | |
| utb.fulltext.faculty | Faculty of Applied Informatics | |
| utb.fulltext.ou | Department of Electronics and Measurements | |
| utb.fulltext.ou | Department of Electronics and Measurements | |
| utb.fulltext.ou | Department of Electronics and Measurements | |
| utb.fulltext.ou | Department of Electronics and Measurements |
