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Nanopatterning of silicon nitride membranes

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Citace článku v konferenčním sborníku:
MATĚJKA, Milan, Stanislav KRÁTKÝ, Tomáš ŘIHÁČEK, Vladimír KOLAŘÍK, Jana CHLUMSKÁ a Michal URBÁNEK. Nanopatterning of silicon nitride membranes. In: 8th International Conference on Nanomaterials - Research & Application (NANOCON 2016) [online]. Brno: TANGER Ltd., 2016, s. 709-714. [cit. 2020-11-29]. Dostupné z: https://www.nanocon.eu/cz/sbornik-nanocon-2016/.

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