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Hiding E-beam exposure fields by deterministic aperiodic 2D patterning

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dc.title Hiding E-beam exposure fields by deterministic aperiodic 2D patterning en
dc.contributor.author Horáček, Miroslav
dc.contributor.author Knápek, Alexandr
dc.contributor.author Matějka, Milan
dc.contributor.author Krátký, Stanislav
dc.contributor.author Urbánek, Michal
dc.contributor.author Mika, Filip
dc.contributor.author Kolařík, Vladimír
dc.relation.ispartof Recent Trends in Charged Particle Optics and Surface Physics Instrumentation
dc.date.issued 2018
dc.citation.spage 36
dc.citation.epage 36
dc.event.title 16th International Seminar of the Institute-of-Scientific-Instruments-The-Czech-Academy-of-Sciences
dc.event.location Brno
utb.event.state-en Czech republic
utb.event.state-cs Česká republika
dc.event.sdate 2018-06-04
dc.event.edate 2018-06-08
dc.type conferenceObject
dc.language.iso en
dc.publisher Czech Academy of Science, Institute of Scientific Instruments
utb.faculty University Institute
dc.identifier.uri http://hdl.handle.net/10563/1008429
utb.identifier.obdid 43879316
utb.identifier.wok 000450591400012
utb.source d-wok
dc.date.accessioned 2019-01-31T08:59:01Z
dc.date.available 2019-01-31T08:59:01Z
utb.ou Centre of Polymer Systems
utb.contributor.internalauthor Urbánek, Michal
utb.fulltext.affiliation M. Horáček 1, A. Knápek 1, V. Tryhuk 2, M. Matějka 1, S. Krátký 1, M. Urbánek 3, F. Mika 1, V. Kolařík 1* 1 Institute of Scientific Instruments CAS, Královopolská 147, 612 64 Brno, Czech Republic 2 Brno Technical University, Fac. of Civil Engineering, Institute of Mathematics and Descriptive Geometry, Žižkova 17, 602 00 Brno, CZ 3 Tomas Bata University, Centre of Polymer Systems, tř. Tomáše Bati 5678, 760 01 Zlín, CZ * e-mail: Vladimir.Kolarik@isibrno.cz
utb.fulltext.dates -
utb.wos.affiliation [Horacek, M.; Knapek, A.; Matejka, M.; Kratky, S.; Mika, F.; Kolarik, V.] Inst Sci Instruments CAS, Kralovopolska 147, Brno 61264, Czech Republic; [Urbanek, M.] Tomas Bata Univ, Ctr Polymer Syst, Tr Tomase Bati 5678, Zlin 76001, Czech Republic
utb.fulltext.faculty University Institute
utb.fulltext.ou Centre of Polymer Systems
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