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Characterization of ultra-thin tungsten layers

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dc.title Characterization of ultra-thin tungsten layers en
dc.contributor.author Martínek, Tomáš
dc.contributor.author Kudělka, Josef
dc.contributor.author Navrátil, Milan
dc.contributor.author Fořt, Tomáš
dc.contributor.author Křesálek, Vojtěch
dc.relation.ispartof International Journal of Applied Engineering Research
dc.identifier.issn 0973-4562 Scopus Sources, Sherpa/RoMEO, JCR
dc.date.issued 2016
utb.relation.volume 11
utb.relation.issue 11
dc.citation.spage 7523
dc.citation.epage 7525
dc.type article
dc.language.iso en
dc.publisher Research India Publications
dc.relation.uri https://www.ripublication.com/Volume/ijaerv11n11.htm
dc.subject Atomic force microscopy en
dc.subject Metrology en
dc.subject Nanocharacterization en
dc.subject Nanocomposite en
dc.subject Surface resistivity en
dc.subject Tungsten en
dc.subject Ultra-thin film en
dc.description.abstract Atomic force microscopy and surface resistivity measurement were used for characterization of ultra-thin tungsten layers deposited on purified silicon with 200 nm thermic silicon dioxide substrate. Radio-frequency magnetron sputtering was used for tungsten deposition. © Research India Publications. en
utb.faculty Faculty of Applied Informatics
dc.identifier.uri http://hdl.handle.net/10563/1007163
utb.identifier.obdid 43875776
utb.identifier.scopus 2-s2.0-85016153536
utb.source j-scopus
dc.date.accessioned 2017-08-01T08:27:24Z
dc.date.available 2017-08-01T08:27:24Z
dc.rights Attribution-Noncommercial 2.5 India
dc.rights.uri https://creativecommons.org/licenses/by-nc/2.5/in/
dc.rights.access openAccess
utb.contributor.internalauthor Martínek, Tomáš
utb.contributor.internalauthor Kudělka, Josef
utb.contributor.internalauthor Navrátil, Milan
utb.contributor.internalauthor Křesálek, Vojtěch
utb.fulltext.affiliation Tomas Martinek 1 , Josef Kudelka 1 , Milan Navratil 1 , Tomas Fort 2 and Vojtech Kresalek 1 1 Tomas Bata University in Zlin, Faculty of Applied Informatics, Department of Electronics and Measurement, Nad Stranemi 4511, 760 05 Zlin, Czech Republic. 2 Institute of Scientific Instruments ASCR, Kralovopolska 147, 612 64 Brno, Czech Republic.
utb.fulltext.sponsorship This project was performed with financial support by the Ministry of Education, Youth and Sports of the Czech Republic within the National Sustainability Programme project No. LO1030 (MSMT-7778/2014) and with support by the Internal Grant Agency of Tomas Bata University under the project IGA/CebiaTech/2016/003 and by Ministry of Education, Youth and Sports of the Czech Republic (project LO1212). The research infrastructure was funded by Ministry of Education, Youth and Sports of the Czech Republic and European Commission (project CZ.1.05/2.1.00/01.0017) and by The Czech Academy of Sciences (project RVO:68081731).
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