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Characterization of epitaxial layers using scanning microwave microscopy

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dc.title Characterization of epitaxial layers using scanning microwave microscopy en
dc.contributor.author Martínek, Tomáš
dc.contributor.author Kudělka, Josef
dc.contributor.author Navrátil, Milan
dc.contributor.author Křesálek, Vojtěch
dc.relation.ispartof Annals of DAAAM and Proceedings of the International DAAAM Symposium
dc.identifier.issn 1726-9679 Scopus Sources, Sherpa/RoMEO, JCR
dc.identifier.isbn 978-3-902734-07-5
dc.date.issued 2015
utb.relation.volume 2015-January
dc.citation.spage 1109
dc.citation.epage 1114
dc.event.title 26th DAAAM International Symposium on Intelligent Manufacturing and Automation, DAAAM 2015
dc.event.location Zadar
utb.event.state-en Croatia
utb.event.state-cs Chorvatsko
dc.event.sdate 2015-10-21
dc.event.edate 2015-10-24
dc.type conferenceObject
dc.language.iso en
dc.publisher Danube Adria Association for Automation and Manufacturing, DAAAM
dc.identifier.doi 10.2507/26th.daaam.proceedings.156
dc.relation.uri http://doi.org/10.2507/26th.daaam.proceedings.045
dc.subject Atomic force microscopy en
dc.subject Dopant density en
dc.subject Epitaxial layers en
dc.subject Scanning microwave microscopy en
dc.subject Vapour phase epitaxy en
dc.description.abstract In this article, atomic force microscopy and its variation scanning microwave microscopy were used for characterizatio of the epitaxial layers with different dopant doping levels specified by the manufacturing data. The vapour phase epitax was used for the deposition of individual layers on a silicon substrate. The measured data were visualized and compare with the manufacturing data. en
utb.faculty Faculty of Applied Informatics
dc.identifier.uri http://hdl.handle.net/10563/1006767
utb.identifier.obdid 43873850
utb.identifier.scopus 2-s2.0-84987667653
utb.source d-scopus
dc.date.accessioned 2016-12-22T16:19:08Z
dc.date.available 2016-12-22T16:19:08Z
utb.contributor.internalauthor Martínek, Tomáš
utb.contributor.internalauthor Kudělka, Josef
utb.contributor.internalauthor Navrátil, Milan
utb.contributor.internalauthor Křesálek, Vojtěch
utb.fulltext.affiliation Tomas Martinek, Josef Kudelka, Milan Navratil, Vojtech Kresalek Tomas Bata University in Zlin, Nad Stranemi 4511, Zlin 76005, Czech Republic
utb.fulltext.dates -
utb.fulltext.sponsorship This work was performed with financial support by the Ministry of Education, Youth and Sports of the Czech Republic within the National Sustainability Programme project No. LO1303 (MSMT-7778/2014) and with support by Internal Grant Agency of Tomas Bata University under project IGA/CebiaTech/2015/045 and IGA/FAI/2015/048.
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