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The effect of tip speed in AFM scratching
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| dc.title | The effect of tip speed in AFM scratching | en |
| dc.contributor.author | Kudělka, Josef | |
| dc.contributor.author | Martínek, Tomáš | |
| dc.contributor.author | Navrátil, Milan | |
| dc.contributor.author | Křesálek, Vojtěch | |
| dc.relation.ispartof | IDT 2016 - Proceedings of the International Conference on Information and Digital Technologies 2016 | |
| dc.identifier.isbn | 9781467388603 | |
| dc.date.issued | 2016 | |
| dc.citation.spage | 160 | |
| dc.citation.epage | 163 | |
| dc.event.title | 2016 International Conference on Information and Digital Technologies, IDT 2016 | |
| dc.event.location | Rzeszów | |
| utb.event.state-en | Poland | |
| utb.event.state-cs | Polsko | |
| dc.event.sdate | 2016-07-05 | |
| dc.event.edate | 2016-07-07 | |
| dc.type | article | |
| dc.language.iso | en | |
| dc.publisher | Institute of Electrical and Electronics Engineers (IEEE) | |
| dc.identifier.doi | 10.1109/DT.2016.7557167 | |
| dc.relation.uri | http://ieeexplore.ieee.org/document/7557167/ | |
| dc.subject | AFM scratching | en |
| dc.subject | atomic force microscopy | en |
| dc.subject | scanning probe lithography | en |
| dc.subject | tip speed | en |
| dc.description.abstract | In this study, we investigated the effect of tip speed in AFM scratching. Three testing patterns were engraved on polycarbonate substrate at different scratching parameters. The subsequent characterization of fabricated structures was performed using the identical atomic force microscope. It was found that the depth and width depend only weakly on tip speed. © 2016 IEEE. | en |
| utb.faculty | Faculty of Applied Informatics | |
| dc.identifier.uri | http://hdl.handle.net/10563/1006759 | |
| utb.identifier.obdid | 43875782 | |
| utb.identifier.scopus | 2-s2.0-84988808515 | |
| utb.identifier.wok | 000389469300027 | |
| utb.source | d-scopus | |
| dc.date.accessioned | 2016-12-22T16:19:06Z | |
| dc.date.available | 2016-12-22T16:19:06Z | |
| dc.description.sponsorship | MOE, Ministry of Education | |
| utb.contributor.internalauthor | Kudělka, Josef | |
| utb.contributor.internalauthor | Martínek, Tomáš | |
| utb.contributor.internalauthor | Navrátil, Milan | |
| utb.contributor.internalauthor | Křesálek, Vojtěch | |
| utb.fulltext.affiliation | Josef Kudelka, Tomas Martinek, Milan Navratil, Vojtech Kresalek Department of Electronics and Measurement Faculty of Applied Informatics, Tomas Bata University in Zlín Zlín, Czech Republic | |
| utb.fulltext.dates | - | |
| utb.fulltext.sponsorship | This work was supported by the Ministry of Education, Youth and Sports of the Czech Republic within the National Sustainability Programme project No. LO1303 (MSMT-7778/2014). | |
| utb.fulltext.projects | LO1303 (MSMT-7778/2014) |
