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Browsing by Subject "Wet anisotropic etching"

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The effect of temperature gradient on the variation of surface topography and reflectivity of anisotropically etched silicon wafers

Kotěna, Jan; Minařík, Antonín; Wrzecionko, Erik; Smolka, Petr; Minaříková, Magda; Minařík, Martin; Mráček, Aleš; Kuřitka, Ivo; Machovský, Michal (Elsevier, 2017)

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