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| Hiding E-beam exposure fields by deterministic aperiodic 2D patterning | 860 |
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| May 2025 | June 2025 | July 2025 | August 2025 | September 2025 | October 2025 | November 2025 | |
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| Hiding E-beam exposure fields by deterministic aperiodic 2D patterning | 5 | 3 | 18 | 5 | 24 | 7 | 4 |
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