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| Nanopatterning of silicon nitride membranes | 496 |
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| December 2024 | January 2025 | February 2025 | March 2025 | April 2025 | May 2025 | June 2025 | |
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| Nanopatterning of silicon nitride membranes | 3 | 11 | 15 | 16 | 8 | 1 | 2 |
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| Fulltext_1007314.pdf | 128 |
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