Characterization of epitaxial layers using scanning microwave microscopy

Martínek, Tomáš; Kudělka, Josef; Navrátil, Milan; Křesálek, Vojtěch

dc.title	Characterization of epitaxial layers using scanning microwave microscopy	en
dc.contributor.author	Martínek, Tomáš
dc.contributor.author	Kudělka, Josef
dc.contributor.author	Navrátil, Milan
dc.contributor.author	Křesálek, Vojtěch
dc.relation.ispartof	Annals of DAAAM and Proceedings of the International DAAAM Symposium
dc.identifier.issn	1726-9679 Scopus Sources, Sherpa/RoMEO, JCR
dc.identifier.isbn	978-3-902734-07-5
dc.date.issued	2015
utb.relation.volume	2015-January
dc.citation.spage	1109
dc.citation.epage	1114
dc.event.title	26th DAAAM International Symposium on Intelligent Manufacturing and Automation, DAAAM 2015
dc.event.location	Zadar
utb.event.state-en	Croatia
utb.event.state-cs	Chorvatsko
dc.event.sdate	2015-10-21
dc.event.edate	2015-10-24
dc.type	conferenceObject
dc.language.iso	en
dc.publisher	Danube Adria Association for Automation and Manufacturing, DAAAM
dc.identifier.doi	10.2507/26th.daaam.proceedings.156
dc.relation.uri	http://doi.org/10.2507/26th.daaam.proceedings.045
dc.subject	Atomic force microscopy	en
dc.subject	Dopant density	en
dc.subject	Epitaxial layers	en
dc.subject	Scanning microwave microscopy	en
dc.subject	Vapour phase epitaxy	en
dc.description.abstract	In this article, atomic force microscopy and its variation scanning microwave microscopy were used for characterizatio of the epitaxial layers with different dopant doping levels specified by the manufacturing data. The vapour phase epitax was used for the deposition of individual layers on a silicon substrate. The measured data were visualized and compare with the manufacturing data.	en
utb.faculty	Faculty of Applied Informatics
dc.identifier.uri	http://hdl.handle.net/10563/1006767
utb.identifier.obdid	43873850
utb.identifier.scopus	2-s2.0-84987667653
utb.source	d-scopus
dc.date.accessioned	2016-12-22T16:19:08Z
dc.date.available	2016-12-22T16:19:08Z
dc.rights	Attribution-NonCommercial 4.0 International
dc.rights.uri	https://creativecommons.org/licenses/by-nc/4.0/
dc.rights.access	openAccess
utb.contributor.internalauthor	Martínek, Tomáš
utb.contributor.internalauthor	Kudělka, Josef
utb.contributor.internalauthor	Navrátil, Milan
utb.contributor.internalauthor	Křesálek, Vojtěch
utb.fulltext.affiliation	Tomas Martinek, Josef Kudelka, Milan Navratil, Vojtech Kresalek Tomas Bata University in Zlin, Nad Stranemi 4511, Zlin 76005, Czech Republic
utb.fulltext.dates	-
utb.fulltext.sponsorship	This work was performed with financial support by the Ministry of Education, Youth and Sports of the Czech Republic within the National Sustainability Programme project No. LO1303 (MSMT-7778/2014) and with support by Internal Grant Agency of Tomas Bata University under project IGA/CebiaTech/2015/045 and IGA/FAI/2015/048.
utb.fulltext.projects	LO1303 (MSMT-7778/2014)
utb.fulltext.projects	IGA/CebiaTech/2015/045
utb.fulltext.projects	IGA/FAI/2015/048